Microfabrication Technology
EL ENG 143 Microfabrication Technology 4 Units
Faculty in charge: Prof. A. Javey
Offered through: Electrical Engin and Computer Sci
Terms offered: 2015 Fall, 2015 Spring, 2014 Fall
Catalog description:
Integrated circuit device fabrication and surface micromachining technology. Thermal oxidation, ion implantation, impurity diffusion, film deposition, expitaxy, lithography, etching, contacts and interconnections, and process integration issues. Device design and mask layout, relation between physical structure and electrical/mechanical performance. MOS transistors and poly-Si surface microstructures will be fabricated in the laboratory and evaluated.
Number of students in lab: 19
Labs are held in 218 Cory
Stations 1 to 6 (6 stations)