Introduction to Microelectromechanical Systems (MEMS)
EL ENG 147 Introduction to Microelectromechanical Systems (MEMS) 3 Units
EL ENG 247A Introduction to Microelectromechanical Systems (MEMS) 3 Units
Faculty in charge: Prof. K. Pister
Terms offered: 2015 Fall
Catalog description:
This course will teach fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other technologies that are central to MEMS fabrication. It will pay special attention to teaching of fundamentals necessary for the design and analysis of devices and systems in mechanical, electrical, fluidic, and thermal energy/signal domains, and will teach basic techniques for multi-domain analysis. Fundamentals of sensing and transduction mechanisms including capacitive and piezoresistive techniques, and design and analysis of micromachined miniature sensors and actuators using these techniques will be covered.
Number of students in lab:
Labs are held in 218 Cory